nucВестник НЯЦ РКNNC RK Bulletin1729-75161729-7885Национальный ядерный центр Республики Казахстан10.52676/1729-7885-2018-3-83-86nuc-104Research ArticleСтатьиИЗМЕНЕНИЕ СТРУКТУРНЫХ СВОЙСТВ Cu ПЛЕНОК В РЕЗУЛЬТАТЕ ВОЗДЕЙСТВИЯ НИЗКОЭНЕРГЕТИЧНЫХ ИОНОВCHANGES OF STRUCTURAL PROPERTIES OF Cu FILMS AS RESULTS OF IMPACT OF LOW-POWER ENERGY IONSКалиекперовМ. Е.KaliekperovM. E.

Астана;

Алматы

Astana;

Almaty

ШлимасД. И.ShlimasD. I.

Астана;

Алматы

Astana;

Almaty

КозловскийА. Л.KozlovskiyA. L.

Астана;

Алматы

Astana;

Almaty

КадыржановК. К.KadyrzhanovK. K.

Астана

Astana

Евразийский национальный университет им. Л.Н. Гумилева; Институт ядерной физикиКазахстанL.N. Gumilyov Eurasian National University; Institute of Nuclear PhysicsKazakhstanЕвразийский национальный университет им. Л.Н. ГумилеваКазахстанL.N. Gumilyov Eurasian National UniversityKazakhstan201830092018038386Copyright © Калиекперов М.Е., Шлимас Д.И., Козловский А.Л., Кадыржанов К.К., 20182018Калиекперов М.Е., Шлимас Д.И., Козловский А.Л., Кадыржанов К.К.Kaliekperov M.E., Shlimas D.I., Kozlovskiy A.L., Kadyrzhanov K.K.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://journals.nnc.kz/jour/article/view/104

В работе представлены результаты исследований влияния облучения низкоэнергетичными ионами Не+2 с энергией 30 кэВ (15 кэВ на заряд) на структурные свойства Cu пленок. В результате облучения исходных образцов ионами Не+2 дозой 1·1016 ион/см2 наблюдается изменение морфологии поверхности Cu пленок, образование наноразмерных включений шестигранной формы. Увеличение дозы облучения до 1·1017 ион/см2 и выше приводит к формированию трещин и аморфных оксидных включений на поверхности образца. Установлено, что увеличение дозы облучения приводит к снижению степени кристалличности и изменению основных кристаллографических характеристик.

In this paper, we present the results of studies of the irradiation effect with low-energy He+2 ions with an energy of 30 keV (15 keV per charge) on the structural properties of Cu films. As a result of irradiation of initial samples with He+2 ions with a dose of 1·1016 ion/cm2, a change in the Cu surface morphology of films is observed, and the formation of nanoscale inclusions of hexagonal shape is observed. An increase in the irradiation dose to 1·1017 ion/cm2 and higher leads to the formation of cracks and amorphous oxide inclusions on the sample surface. It is established that an increase in the irradiation dose leads to a decrease in the degree of crystallinity and a change in the basic crystallographic characteristics.

Работа выполнена в рамках Грантового финансирования МОН РК по договору №132 от 12 марта 2018 года.ReferencesKim J. Y., Kim Y. G., Stickney J. L. Cu nanofilm formation by electrochemical atomic layer deposition (ALD) in the presence of chloride ions //Journal of Electroanalytical Chemistry. – 2008. – V. 621. – №. 2. – P. 205–213.Kim J. Y., Kim Y. G., Stickney J. L. Cu nanofilm formation by electrochemical atomic layer deposition (ALD) in the presence of chloride ions //Journal of Electroanalytical Chemistry. – 2008. – V. 621. – №. 2. – P. 205–213.Huang C. et al. Electron mean free path model for rectangular nanowire, nanofilm and nanoparticle //Physica B: Condensed Matter. – 2014. – V. 438. – P. 17–21.Huang C. et al. Electron mean free path model for rectangular nanowire, nanofilm and nanoparticle //Physica B: Condensed Matter. – 2014. – V. 438. – P. 17–21.Gebregziabiher D. K. et al. Electrochemical atomic layer deposition of copper nanofilms on ruthenium //Journal of Crystal Growth. – 2010. – V. 312. – №. 8. – P. 1271–1276.Gebregziabiher D. K. et al. Electrochemical atomic layer deposition of copper nanofilms on ruthenium //Journal of Crystal Growth. – 2010. – V. 312. – №. 8. – P. 1271–1276.Hao J. et al. Surface modification of silver nanofilms for improved perchlorate detection by surface-enhanced Raman scattering //Journal of colloid and interface science. – 2012. – V. 377. – №. 1. – P. 51–57.Hao J. et al. Surface modification of silver nanofilms for improved perchlorate detection by surface-enhanced Raman scattering //Journal of colloid and interface science. – 2012. – V. 377. – №. 1. – P. 51–57.Gao Y. et al. Radiation tolerance of Cu/W multilayered nanocomposites //Journal of Nuclear Materials. – 2011. – V. 413. – № 1. – P. 11–15.Gao Y. et al. Radiation tolerance of Cu/W multilayered nanocomposites //Journal of Nuclear Materials. – 2011. – V. 413. – № 1. – P. 11–15.Liu X. et al. A high-performance UV/visible photodetector of Cu 2 O/ZnO hybrid nanofilms on SWNT-based flexible conducting substrates //Journal of Materials Chemistry C. – 2014. – V. 2. – №. 44. – P. 9536–9542.Liu X. et al. A high-performance UV/visible photodetector of Cu 2 O/ZnO hybrid nanofilms on SWNT-based flexible conducting substrates //Journal of Materials Chemistry C. – 2014. – V. 2. – №. 44. – P. 9536–9542.Hong M. et al. Size-dependent radiation tolerance and corrosion resistance in ion irradiated CrN/AlTiN nanofilms //Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. – 2015. – V. 342. – P. 137–143.Hong M. et al. Size-dependent radiation tolerance and corrosion resistance in ion irradiated CrN/AlTiN nanofilms //Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. – 2015. – V. 342. – P. 137–143.Dong L. et al. Period-thickness dependent responses of Cu/W multilayered nanofilms to ions irradiation under different ion energies //Journal of Nuclear Materials. – 2017. – V. 497. – P. 117–127.Dong L. et al. Period-thickness dependent responses of Cu/W multilayered nanofilms to ions irradiation under different ion energies //Journal of Nuclear Materials. – 2017. – V. 497. – P. 117–127.Wang L. et al. The Evolution Behavior of Defects in the Nanofilms of W/Cu and W Probed by Doppler Broadening Positron Annihilation Spectroscopy //Defect and Diffusion Forum. – Trans Tech Publications, 2016. – V. 373. – P. 104–107.Wang L. et al. The Evolution Behavior of Defects in the Nanofilms of W/Cu and W Probed by Doppler Broadening Positron Annihilation Spectroscopy //Defect and Diffusion Forum. – Trans Tech Publications, 2016. – V. 373. – P. 104–107.Wang H. et al. Enhanced radiation tolerance of YSZ/Al2O3 multilayered nanofilms with pre-existing nanovoids //Acta Materialia. – 2018. – V. 144. – P. 691–699.Wang H. et al. Enhanced radiation tolerance of YSZ/Al2O3 multilayered nanofilms with pre-existing nanovoids //Acta Materialia. – 2018. – V. 144. – P. 691–699.

The authors declare that there are no conflicts of interest present.