nucВестник НЯЦ РКNNC RK Bulletin1729-75161729-7885Национальный ядерный центр Республики Казахстан10.52676/1729-7885-2020-2-21-25nuc-236Research ArticleСтатьиИССЛЕДОВАНИЕ СТРУКТУРНО-ФАЗОВОГО СОСТОЯНИЯ АЗОТСОДЕРЖАЩИХ ПОКРЫТИЙ ДИОКСИДА ТИТАНА, СИНТЕЗИРОВАННЫХ МЕТОДОМ РЕАКТИВНОГО МАГНЕТРОННОГО РАСПЫЛЕНИЯSTUDY OF THE STRUCTURAL-PHASE STATE OF NITROGEN – CONTAINING COATINGS OF TITANIUM DIOXIDE SYNTHESIZED BY THE REACTIVE MAGNETRON SPUTTERINGАубакироваД. М.AubakirovaD. M.

Усть-Каменогорск

Ust-Kamenogorsk

ПичугинВ. Ф.PichuginV. F.

Томск

Tomsk

ЕрдыбаеваН. К.YerdybaevaN. K.

Усть-Каменогорск

Ust-Kamenogorsk

СагдолдинаЖ. Б.SagdoldinaZh. B.

Усть-Каменогорск

Ust-Kamenogorsk

sagdoldina@mail.ruВосточно-Казахстанский государственный технический университет им. Д. СерикбаеваКазахстанD. Serikbayev East Kazakhstan state technical universityKazakhstanТомский политехнический университетРоссияTomsk polytechnic universityRussian FederationВосточно-Казахстанский государственный университет им. С. АманжоловаКазахстанS. Amanzholov East Kazakhstan state universityKazakhstan202030062020022125Copyright © Аубакирова Д.М., Пичугин В.Ф., Ердыбаева Н.К., Сагдолдина Ж.Б., 20202020Аубакирова Д.М., Пичугин В.Ф., Ердыбаева Н.К., Сагдолдина Ж.Б.Aubakirova D.M., Pichugin V.F., Yerdybaeva N.K., Sagdoldina Z.B.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://journals.nnc.kz/jour/article/view/236

В работе представлены результаты исследования влияния соотношения реактивных газов N2 и O2 на структурно-фазовое состояние и механические свойства азотсодержащих покрытий диоксида титана, полученных методом реактивного магнетронного распыления на поверхности нержавеющей стали12Х18Н10Т. По результатам рентгенофазового анализа покрытия содержат диоксид титана в форме анатаза, рутил и небольшое содержание брукита. Установлено, что с ростом содержания азота в рабочей атмосфере объемная доля анатаза и рутила растет. Увеличение содержание азота в газовой атмосфере приводит к образованию квазиоднородной текстуры поверхности с менее выраженной блочной структурой. На основе результатов наноиндентирования можно предположить, что образование квазиоднородной текстуры может послужить причиной снижения физико-механических параметров покрытий. Установлено, что структура, фазовый состав и механические свойства покрытий зависят от величины соотношения газов N2/O2 в режиме отрицательного смещения (Uсм= −150 В).

The paper presents the results of the study of the effect of ratios of reactive gases N2 and O2 on the structural phase state and the mechanical properties of nitrogen-containing titanium dioxide coatings obtained by reactive magnetron sputtering on the surface of AISI 304 stainless steel. According to the results of the X-ray phase analysis, the coatings contain titanium dioxide in the form of anatase, rutile and a small amount of brookite. It was found that with an increase in the nitrogen content in the working atmosphere, the volume fraction of anatase and rutile increases. An increase in the nitrogen content in the gas atmosphere leads to the formation of a quasihomogeneous surface texture with a less pronounced block structure. Based on the results of nanoindentation, it can be assumed that the formation of a quasihomogeneous texture can cause a decrease in the physicomechanical parameters of the coatings. It was established that the structure, phase composition, and mechanical properties of the coatings depend on the gas ratio N2/O2 in theт negative bias mode (Ubias = −150 V).

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The authors declare that there are no conflicts of interest present.