<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">nuc</journal-id><journal-title-group><journal-title xml:lang="ru">Вестник НЯЦ РК</journal-title><trans-title-group xml:lang="en"><trans-title>NNC RK Bulletin</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1729-7516</issn><issn pub-type="epub">1729-7885</issn><publisher><publisher-name>Национальный ядерный центр Республики Казахстан</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.52676/1729-7885-2024-1-13-23</article-id><article-id custom-type="elpub" pub-id-type="custom">nuc-600</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Статьи</subject></subj-group></article-categories><title-group><article-title>КРАТКИЙ ОБЗОР СПОСОБОВ ПОЛУЧЕНИЯ ПОКРЫТИЙ TiSiCN   И МЕТОДА РЕАКТИВНО-ПЛАЗМЕННОГО НАПЫЛЕНИЯ</article-title><trans-title-group xml:lang="en"><trans-title>BRIEF OVERVIEW OF METHODS FOR PRODUCING TiSiCN COATINGS  AND THE METHOD OF REACTIVE PLASMA SPRAYING</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Баймолданова</surname><given-names>Л. С.</given-names></name><name name-style="western" xml:lang="en"><surname>Baimoldanova</surname><given-names>L.  S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>г. Усть-Каменогорск</p></bio><bio xml:lang="en"><p>Ust-Kamenogorsk</p></bio><email xlink:type="simple">lyazbs_82@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Рахадилов</surname><given-names>Б. К.</given-names></name><name name-style="western" xml:lang="en"><surname>Rakhadilov</surname><given-names>B. K.</given-names></name></name-alternatives><bio xml:lang="ru"><p>г. Усть-Каменогорск</p></bio><bio xml:lang="en"><p>Ust-Kamenogorsk</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кенесбеков</surname><given-names>А.</given-names></name><name name-style="western" xml:lang="en"><surname>Kenesbekov</surname><given-names>A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>г. Усть-Каменогорск</p></bio><bio xml:lang="en"><p>Ust-Kamenogorsk</p></bio><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Кусайнов</surname><given-names>А.</given-names></name><name name-style="western" xml:lang="en"><surname>Kussainov</surname><given-names>A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>г. Усть-Каменогорск</p></bio><bio xml:lang="en"><p>Ust-Kamenogorsk</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Маулит</surname><given-names>А.</given-names></name><name name-style="western" xml:lang="en"><surname>Maulit</surname><given-names>A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>г. Усть-Каменогорск</p></bio><bio xml:lang="en"><p>Ust-Kamenogorsk</p></bio><xref ref-type="aff" rid="aff-3"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru">Plasma Science LLP; Восточно-Казахстанский университет имени Сарсена Аманжолова<country>Казахстан</country></aff><aff xml:lang="en">Plasma Science LLP; Sarsen Amanzholov East Kazakhstan University<country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru">Plasma Science LLP<country>Казахстан</country></aff><aff xml:lang="en">Plasma Science LLP<country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru">Plasma Science LLP; Университет имени Шакарима города Семей<country>Казахстан</country></aff><aff xml:lang="en">Plasma Science LLP; Shakarim University of Semey<country>Kazakhstan</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2024</year></pub-date><pub-date pub-type="epub"><day>28</day><month>03</month><year>2024</year></pub-date><volume>0</volume><issue>1</issue><fpage>13</fpage><lpage>23</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Баймолданова Л.С., Рахадилов Б.К., Кенесбеков А., Кусайнов А., Маулит А., 2024</copyright-statement><copyright-year>2024</copyright-year><copyright-holder xml:lang="ru">Баймолданова Л.С., Рахадилов Б.К., Кенесбеков А., Кусайнов А., Маулит А.</copyright-holder><copyright-holder xml:lang="en">Baimoldanova L.S., Rakhadilov B.K., Kenesbekov A., Kussainov A., Maulit A.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://journals.nnc.kz/jour/article/view/600">https://journals.nnc.kz/jour/article/view/600</self-uri><abstract><p>Современное материаловедение ставит перед собой задачу разработки новых материалов с многофункциональными покрытиями. Материалы с такими покрытиями имеют широкое применение в различных областях техники: в строительстве и энергетике, в микроэлектронике, в авиации и других. Основной причиной возникновения и развития технологии нанесения многофункциональных защитных покрытий является стремление повысить долговечность деталей и узлов различных механизмов машин. Износостойкие твердые покрытия на основе нитридов переходных металлов и карбонитридов широко используются для увеличения срока службы штампов для ковки и экструзии, а также высокоскоростных обрабатывающих инструментов. За последние два десятилетия широкое распространение этих покрытий стимулировало и поддерживало разработку новых процессов и материалов в попытке дальнейшего улучшения их свойств. Среди этих покрытий более высокая твердость, отличная стойкость к окислению и высокая термическая стабильность покрытий, таких как TiSiN и TiSiCN, делают их наиболее перспективными кандидатами для трибологических приложений с высокими требованиями. Кроме того, покрытие TiSiCN является перспективным материалом, используемым в морской среде, благодаря его превосходной противоизносной и коррозионной стойкости, а также высокой твердости и низкому коэффициенту трения. Такие сочетания свойств делают покрытия TiSiCN потенциальными кандидатами на получение защитного слоя в автомобильной и нефтяной промышленности.</p><p>В статье кратко рассмотрены возможности получения покрытий TiSiCN разными методами осаждения для управления свойствами получаемых пленок и особенности метода реактивно-плазменного напыления. В работе описываются самые распространенные способы и технологии получения карбонитридных покрытий, используемые в настоящее время. Рассматриваются последние разработки и актуальные тенденции в области технологий плазменного напыления покрытия, при этом учитывается важные новации для промышленных покрытий. На них базируются новые выводы, которые были получены в результате фундаментальных и прикладных исследований физики или химии. В статье проведен сравнительный обзор характеристик получения износостойких покрытий TiSiCN и особенности применения реактивно-плазменного напыления для получения износостойких покрытий. На основании анализа литературы можно утверждать, что дальнейшее развитие технологии реактивной плазмы связано с разработкой нового ресурсосберегающего способа формирования композиционных покрытий с повышенными коррозионными и трибологическими характеристиками, что соответствует тенденциям развития мировой науки.</p></abstract><trans-abstract xml:lang="en"><p>Modern materials science sets itself the task of developing new materials with multifunctional coatings. Materials with such coatings are widely used in various fields of technology: construction and energy, microelectronics, aviation and others. The main reason for the emergence and development of technology for applying multifunctional protective coatings is the desire to increase the durability of parts and assemblies of various machine mechanisms. Wear-resistant hard coatings based on transition metal nitrides and carbonitrides are widely used to extend the life of forging and extrusion dies and high-speed machining tools. Over the past two decades, the widespread use of these coatings has stimulated and supported the development of new processes and materials in an attempt to further improve their properties. Among these coatings, the higher hardness, excellent oxidation resistance and high thermal stability of coatings such as TiSiN and TiSiCN make them the most promising candidates for demanding tribological applications. In addition, TiSiCN coating is a promising material used in marine environments due to its excellent anti-wear and corrosion resistance, as well as high hardness and low friction coefficient. These combinations of properties make TiSiCN coatings potential candidates for protective layers in the automotive and petroleum industries.</p><p>The article briefly examines the possibilities of producing TiSiCN coatings using different deposition methods to control the properties of the resulting films and the features of the reactive plasma spraying method. The work describes the most common methods and technologies for producing carbonitride coatings currently used. The latest developments and current trends in the field of plasma spray coating technologies are reviewed, taking into account important innovations for industrial coatings. New conclusions that were obtained as a result of fundamental and applied research in physics or chemistry are based on them. The article provides a comparative review of the characteristics of obtaining wear-resistant TiSiCN coatings and the features of using reactive plasma spraying to obtain wear-resistant coatings. Based on an analysis of the literature, it can be argued that the further development of reactive plasma technology is associated with the development of a new resource-saving method for the formation of composite coatings with increased corrosion and tribological characteristics, which corresponds to the development trends of world science. </p></trans-abstract><kwd-group xml:lang="ru"><kwd>плазменное напыление</kwd><kwd>TiSiCN</kwd><kwd>карбонитридные покрытия</kwd><kwd>износ</kwd><kwd>коррозия</kwd><kwd>процессы нанесения покрытий</kwd><kwd>реактивно-плазменное напыление</kwd></kwd-group><kwd-group xml:lang="en"><kwd>plasma spraying</kwd><kwd>TiSiCN</kwd><kwd>carbonitride coatings</kwd><kwd>wear</kwd><kwd>corrosion</kwd><kwd>coating processes</kwd><kwd>reactive plasma spraying</kwd></kwd-group><funding-group xml:lang="ru"><funding-statement>Данное исследование финансируется Комитетом науки Министерства науки и высшего образования Республики Казахстан (грант № AP19175967).</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Dong Yanchun, Yan Dianran, He Jining, Zhang Jianxin, Xiao Lisong, and Li Xiangzhi. 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