nucВестник НЯЦ РКNNC RK Bulletin1729-75161729-7885Национальный ядерный центр Республики Казахстан10.52676/1729-7885-2024-2-91-98nuc-650Research ArticleСтатьиПРИМЕНЕНИЕ МЕТОДА МАГНЕТРОННОГО НАПЫЛЕНИЯ ПРИ ПОЛУЧЕНИИ РАДИОПОГЛОЩАЮЩЕЙ ТОНКОЙ ПЛЕНКИ НА ОСНОВЕ CoCIMPLEMENTATION OF MAGNETRON SPUTTERING METHOD IN OBTAINING A RADIO-ABSORBING THIN FILM BASED ON CoChttps://orcid.org/0000-0002-1209-7335ПрохоренковаН. В.ProkhorenkovaN. V.

PhD по специальности "Физика",

Усть-Каменогорск

Ust-Kamenogorsk

nadin_kaz@mail.ruЖилкашиноваАл. М.ZhilkashinovaAl. M.

Усть-Каменогорск

Ust-Kamenogorsk

asssel2462@mail.ruАбилевМ. Б.AbilevM. B.

Алматы

Almaty

m.abilev@mail.ruОчередькоИ. А.OcheredkoI. A.

Усть-Каменогорск

Ust-Kamenogorsk

ПавловА. В.PavlovA. V.

Москва

Moscow

Alexandr_Pavlov_1988@mail.ruЖилкашиноваАс. М.ZhilkashinovaAs. M.

Усть-Каменогорск

Ust-Kamenogorsk

asssel2462@mail.ruЛаткаЛ.ŁatkaL.

Вроцлав

Wroclaw

leszek.latka@pwr.edu.plВосточно-Казахстанский технический университет им. Д. Серикбаева; Восточно-Казахстанский университет им. С. АманжоловаКазахстанD. Serikbaev East Kazakhstan Technical University; S. Amanzholov East Kazakhstan UniversityKazakhstanВосточно-Казахстанский университет им. С. АманжоловаКазахстанS. Amanzholov East Kazakhstan UniversityKazakhstanКазахский национальный университет им. Аль-ФарабиКазахстанAl-Farabi Kazakh National UniversityKazakhstanНациональный научно-технический центр «Бакор»РоссияNational Science and Technology Center “Bakor”Russian FederationВроцлавский университет науки и технологийПольшаWroclaw University of Science and TechnologyPoland202430062024029198Copyright © Прохоренкова Н.В., Жилкашинова А.М., Абилев М.Б., Очередько И.А., Павлов А.В., Жилкашинова А.М., Латка Л., 20242024Прохоренкова Н.В., Жилкашинова А.М., Абилев М.Б., Очередько И.А., Павлов А.В., Жилкашинова А.М., Латка Л.Prokhorenkova N.V., Zhilkashinova A.M., Abilev M.B., Ocheredko I.A., Pavlov A.V., Zhilkashinova A.M., Łatka L.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://journals.nnc.kz/jour/article/view/650

В работе описаны основные результаты исследования образцов радиопоглощающих пленок CoC, полученных методом магнетронного напыления, и дана оценка данных экспериментальных и расчетных исследований взаимосвязи между структурой и свойствами пленок CoC. Для устранения ферромагнитного эффекта кобальта использовалась составная мишень. Использование составной мишени при магнетронном напылении обеспечивает получение пленок заданного и необходимого состава. Структурно-фазовое состояние полученных пленок исследовали методами РФА, СЭМ и ПЭМ. Отличительной особенностью синтезированного покрытия является отсутствие кристаллической структуры на некоторых участках из-за аморфизирующих свойств кобальта и его склонности к образованию металлических стекол. Результаты, полученные в ходе экспериментов, хорошо согласуются с результатами компьютерного моделирования. Радиопоглощающие свойства полученных пленок были подтверждены результатами измерения потерь на отражение, коэффициента стоячей волны, коэффициентов отражения и импеданса. Результаты, представленные в статье, могут послужить основой для перспективных исследований в этой области.

This paper describes the main results of the study of obtaining samples of radio-absorbing CoC films by magnetron sputtering and evaluates the data of experimental and computational studies on the relationship between the structure and properties of CoC films. To eliminate the ferromagnetic effect of cobalt, a composite target was used. The use of the composite target during magnetron sputtering ensures the production of films of a given and necessary composition. Structural-phase state of the obtained films was studied using XRD, SEM and TEM methods. A distinctive feature of the synthesized coating is the absence of a crystalline structure in some areas due to the amorphizing properties of cobalt and its tendency to form metallic glasses. Results obtained by the experiments are in good agreement with computational modeling results. The radio-absorbing properties of the obtained films were confirmed by the results of measuring the reflection loss, standing wave ratio, reflectance, and impedance. Results presented in the article can serve as a baseline for perspective studies in this field.

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The authors declare that there are no conflicts of interest present.