nucВестник НЯЦ РКNNC RK Bulletin1729-75161729-7885Национальный ядерный центр Республики Казахстан10.52676/1729-7885-2024-2-120-127nuc-657Research ArticleСтатьиИЗУЧЕНИЕ ВАРИАЦИИ УСЛОВИЙ НАПЫЛЕНИЯ НА ИЗМЕНЕНИЕ МЕХАНИЧЕСКИХ ХАРАКТЕРИСТИК MoCrN ПОКРЫТИЙINVESTIGATION OF VARIATION OF SPRAYING CONDITIONS ON VARIATION OF STRENGTH CHARACTERISTICS OF MoCrN COATINGSКенжинЕ. А.KenzhinYe. A.

к.ф.-м.н., ведущий научный сотрудник,

Алматы

Almaty

kenzhin@inp.kzШлимасД. И.ShlimasD. I.

PhD, преподаватель – исследователь,

Алматы

Almaty

shlimas@mail.ruЗикиринаА. М.ZikirinaA. M.

PhD, старший преподаватель,

Алматы

Almaty

https://orcid.org/0000-0001-8832-7443КозловскийА. Л.KozlovskiyA. L.

PhD, доцент, преподаватель – исследователь,

Алматы

Almaty

artem88sddt@mail.ruКазахстанско-Британский технический университетКазахстанKazakh-British Technical UniversityKazakhstanКазахстанско-Британский технический университет; Евразийский национальный университет им. Л.Н. ГумилеваКазахстанKazakh-British Technical University; L.N. Gumilyov Eurasian National UniversityKazakhstanЕвразийский национальный университет им. Л.Н. ГумилеваКазахстанL.N. Gumilyov Eurasian National UniversityKazakhstan20243006202402120127Copyright © Кенжин Е.А., Шлимас Д.И., Зикирина А.М., Козловский А.Л., 20242024Кенжин Е.А., Шлимас Д.И., Зикирина А.М., Козловский А.Л.Kenzhin Y.A., Shlimas D.I., Zikirina A.M., Kozlovskiy A.L.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://journals.nnc.kz/jour/article/view/657

Интерес к тонкопленочным защитным покрытиям на основе нитридных соединений молибдена и хрома обусловлен большими перспективами использования их в качестве износостойких антикоррозионных покрытий, обладающих высокой устойчивостью как внешним воздействиям в виде механического трения, давления, так и процессам коррозии, при воздействии агрессивных сред, наводораживании или высоких температур. Однако показатели устойчивости нитридных покрытий в первую очередь определяются условиями их получения, которые не в последнюю очередь зависят о мощности магнетронного напыления, вариация которой позволяет изменять соотношение элементов в составе покрытий. Ключевая цель проведенных исследований заключается в проведении измерений прочностных характеристик измеренных методом индентирования в зависимости от условий получения покрытий при вариации мощности напыления, а также установлению влияния вариации условий получения тонкопленочных покрытий на изменение твердости и факторов упрочнения. Согласно представленным данным изменение условий магнетронного напыления путем вариации мощности приводит к формированию более прочных устойчивых покрытий, обладающих высокой сопротивляемостью к растрескиванию при изменении внешней нагрузки.  В ходе проведенных исследований было определено, что изменение условий магнетронного напыления покрытий, приводящее к увеличению концентрации молибдена в составе покрытий, приводит к более чем 60–80% упрочнению, а также увеличению устойчивости к растрескиванию при внешних воздействиях.

Interest in thin-film protective coatings based on nitride compounds of molybdenum and chromium is due to the great prospects for their use as wear-resistant anti-corrosion coatings with high resistance to both external effects in the form of mechanical friction, pressure, and corrosion processes, when exposed to aggressive media, hydrogenation or high temperatures. However, the stability of nitride coatings are primarily determined by the conditions of their obtaining, which not least depend on the power of magnetron sputtering, the variation of which allows you to change the ratio of elements in the composition of coatings. The key objective of this research is to measure the strength characteristics measured by indentation method depending on the conditions of obtaining coatings under variation of sputtering power, as well as to establish the influence of variation of conditions of obtaining thin film coatings on the change of hardness and hardening factors. According to the presented data, changing the conditions of magnetron sputtering by varying the power leads to the formation of stronger stable coatings with high resistance to cracking under changing external load. In the course of research it was determined that changing the conditions of magnetron sputtering coatings, leading to an increase in the concentration of molybdenum in the composition of coatings leads to more than 60–80% hardening, as well as an increase in resistance to cracking under external influences.

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The authors declare that there are no conflicts of interest present.