nucВестник НЯЦ РКNNC RK Bulletin1729-75161729-7885Национальный ядерный центр Республики Казахстан10.52676/1729-7885-2026-1-124-132nuc-970Research ArticleСтатьиФОРМИРОВАНИЕ ГРАФИТОПОДОБНЫХ УГЛЕРОДНЫХ ПОКРЫТИЙ ИЗ ГАЗОВОЙ ФАЗЫ С ИСПОЛЬЗОВАНИЕМ МИКРОВОЛНОВОЙ ПЛАЗМЫFORMATION OF CARBON COATINGS FROM THE GAS PHASE USING MICROWAVE PLASMAhttps://orcid.org/0000-0002-1541-6231ТуленбергеновТ. Р.TulenbergenovT. R.

Курчатов

Kurchatov

tulenbergenov@nnc.kzhttps://orcid.org/0009-0008-1404-1782АгатановаА. А.AgatanovaA. A.

Курчатов

Семей

Kurchatov

Semey

agatanova@nnc.kzhttps://orcid.org/0000-0002-7665-4022СоколовИ. А.SokolovI. A.

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Kurchatov

sokolov@nnc.kzhttps://orcid.org/0000-0002-4423-4349ЖанболатоваҒ. Қ.ZhanbolatovaG. K.

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Kurchatov

kaiyrdy@nnc.kzhttps://orcid.org/0009-0006-8141-8557ЖақияР. Е.ZhakiyaR. E.

Курчатов

Семей

Kurchatov

Semey

Zhakiya@nnc.kzhttps://orcid.org/0009-0009-5298-9942КульбединД. С.Kul'bedinD. S.

Курчатов

Семей

Kurchatov

Semey

kulbedin@nnc.kzРГП «Национальный ядерный центр Республики Казахстан»КазахстанRSE “National Nuclear Center of the Republic of the Kazakhstan”KazakhstanФилиал «Институт атомной энергии» РГП НЯЦ РК; НАО «Шакарим университет»КазахстанBranch “Institute of Atomic Energy” RSE NNC RK; NP JSC “Shakarim University”KazakhstanФилиал «Институт атомной энергии» РГП НЯЦ РККазахстанBranch “Institute of Atomic Energy” RSE NNC RKKazakhstan20262504202601124132Copyright © Туленбергенов Т.Р., Агатанова А.А., Соколов И.А., Жанболатова Ғ.Қ., Жақия Р.Е., Кульбедин Д.С., 20262026Туленбергенов Т.Р., Агатанова А.А., Соколов И.А., Жанболатова Ғ.Қ., Жақия Р.Е., Кульбедин Д.С.Tulenbergenov T.R., Agatanova A.A., Sokolov I.A., Zhanbolatova G.K., Zhakiya R.E., Kul'bedin D.S.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://journals.nnc.kz/jour/article/view/970

В работе рассмотрен процесс формирования углеродных покрытий, с характеристиками близкими к алмазоподобным, методом плазмохимического осаждения из газовой фазы на установке ПМ-6, разработанной в лаборатории водородных и плазменных технологий в филиале ИАЭ НЯЦ РК. Впервые на установке ПМ-6 реализована возможность получения углеродных покрытий. Исследовано влияние таких технологических параметров, как мощность СВЧ-разряда, состав газовой смеси и температура кремниевой подложки на морфологию, фазовый состав и физико-механические свойства получаемых покрытий. Морфология и элементный состав покрытий изучались с применением сканирующей электронной микроскопии (СЭМ) и энергодисперсионного анализа (ЭДС), фазовый состав определялся методом рентгенофазового анализа (РФА), а твердость методом Виккерса.

Установлено, что повышение мощности плазменного разряда до 1,1 кВт и увеличение температуры кремниевой подложки способствуют росту доли углерода в покрытии (до 86±5,6 ат.%) и улучшению его равномерности осаждения. Рентгенофазовый анализ показал формирование тонких углеродных слоев с преимущественно графитоподобной структурой. После получения покрытий твердость поверхности достигла 1137 HV, что в два раза превышает показатель твердости исходной кремниевой подложки (416 HV). Результаты подтверждают возможность управляемого синтеза графитоподобных углеродных покрытий посредством оптимизации параметров плазмохимического осаждения.

The study examines the formation of carbon coatings produced by plasma-enhanced chemical vapor deposition (PECVD) in the PM-6 system developed at the Laboratory of Hydrogen and Plasma Technologies of the Branch of the Institute of Atomic Energy of the National Nuclear Center of the Republic of Kazakhstan. For the first time, the PM-6 setup has been used to obtain carbon-based coatings. The influence of key technological parameters such as microwave discharge power, gas mixture composition, and silicon substrate temperature on the morphology, phase composition, and physicomechanical properties of the resulting coatings was investigated. The morphology and elemental composition of the coatings were analyzed using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS), while the phase composition was determined by X-ray diffraction (XRD) and hardness was measured using the Vickers method. It was established that increasing the plasma discharge power to 1.1 kW and raising the silicon substrate temperature enhance the carbon content in the coating (up to 87,66±5,6 at.%) and improve deposition uniformity. X-ray diffraction analysis revealed the formation of thin carbon layers with a predominantly graphitic structure. Following deposition, the surface hardness reached 1137 HV, which is twice that of the initial silicon substrate (416 HV). These results demonstrate the feasibility of controlled synthesis of carbon coatings through optimization of PECVD process parameters.

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The authors declare that there are no conflicts of interest present.