CHANGES OF STRUCTURAL PROPERTIES OF Cu FILMS AS RESULTS OF IMPACT OF LOW-POWER ENERGY IONS
https://doi.org/10.52676/1729-7885-2018-3-83-86
Abstract
In this paper, we present the results of studies of the irradiation effect with low-energy He+2 ions with an energy of 30 keV (15 keV per charge) on the structural properties of Cu films. As a result of irradiation of initial samples with He+2 ions with a dose of 1·1016 ion/cm2, a change in the Cu surface morphology of films is observed, and the formation of nanoscale inclusions of hexagonal shape is observed. An increase in the irradiation dose to 1·1017 ion/cm2 and higher leads to the formation of cracks and amorphous oxide inclusions on the sample surface. It is established that an increase in the irradiation dose leads to a decrease in the degree of crystallinity and a change in the basic crystallographic characteristics.
About the Authors
M. E. Kaliekperov
L.N. Gumilyov Eurasian National University;
Institute of Nuclear Physics
Kazakhstan
Kazakhstan
Astana;
Almaty
D. I. Shlimas
L.N. Gumilyov Eurasian National University;
Institute of Nuclear Physics
Kazakhstan
Kazakhstan
Astana;
Almaty
A. L. Kozlovskiy
L.N. Gumilyov Eurasian National University;
Institute of Nuclear Physics
Kazakhstan
Kazakhstan
Astana;
Almaty
K. K. Kadyrzhanov
L.N. Gumilyov Eurasian National University
Kazakhstan
Kazakhstan
Astana
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Review
For citations:
Kaliekperov M.E., Shlimas D.I., Kozlovskiy A.L., Kadyrzhanov K.K. CHANGES OF STRUCTURAL PROPERTIES OF Cu FILMS AS RESULTS OF IMPACT OF LOW-POWER ENERGY IONS. NNC RK Bulletin. 2018;(3):83-86. (In Russ.) https://doi.org/10.52676/1729-7885-2018-3-83-86
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