For citations:

Kaliekperov M.E., Shlimas D.I., Kozlovskiy A.L., Kadyrzhanov K.K. CHANGES OF STRUCTURAL PROPERTIES OF Cu FILMS AS RESULTS OF IMPACT OF LOW-POWER ENERGY IONS. NNC RK Bulletin. 2018;(3):83-86. (In Russ.) https://doi.org/10.52676/1729-7885-2018-3-83-86