IMPLEMENTATION OF MAGNETRON SPUTTERING METHOD IN OBTAINING A RADIO-ABSORBING THIN FILM BASED ON CoC

This paper describes the main results of the study of obtaining samples of radio-absorbing CoC films by magnetron sputtering and evaluates the data of experimental and computational studies on the relationship between the structure and properties of CoC films. To eliminate the ferromagnetic effect of cobalt, a composite target was used. The use of the composite target during magnetron sputtering ensures the production of films of a given and necessary composition. Structural-phase state of the obtained films was studied using XRD, SEM and TEM methods. A distinctive feature of the synthesized coating is the absence of a crystalline structure in some areas due to the amorphizing properties of cobalt and its tendency to form metallic glasses. Results obtained by the experiments are in good agreement with computational modeling results. The radio-absorbing properties of the obtained films were confirmed by the results of measuring the reflection loss, standing wave ratio, reflectance, and impedance. Results presented in the article can serve as a baseline for perspective studies in this field.

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